Semiconductor nitrogen generator

When manufacturing semiconductors, high-purity nitrogen is usually required to protect semiconductor materials and equipment. A nitrogen generator is a device used to produce high-purity nitrogen. It usually uses air separation technology to separate nitrogen and oxygen in the air to produce high-purity nitrogen.

During the semiconductor manufacturing process, the nitrogen generator can provide stable high-purity nitrogen to protect semiconductor materials and equipment from contamination by oxygen and other impurities. This helps ensure stability and reliability during the semiconductor manufacturing process.

Therefore, nitrogen generators play an important role in semiconductor manufacturing and can help ensure the quality and performance of semiconductor products.

Features

High-purity nitrogen production: The nitrogen generator can produce high-purity nitrogen, which can usually reach the purity requirement of more than 99.999%, ensuring that the gas quality in the semiconductor manufacturing process meets the requirements.

Stable nitrogen supply: The nitrogen generator can provide a stable nitrogen supply to ensure the stability and reliability of nitrogen during the semiconductor manufacturing process.

Automated control: Nitrogen generators usually have automated control systems that can monitor and adjust nitrogen output to meet the needs of different process conditions.

Efficient and energy-saving: Modern nitrogen generators are usually designed to be efficient and energy-saving, capable of producing high-purity nitrogen while reducing energy consumption and operating costs.

Reliability and durability: Nitrogen generators usually have high reliability and durability, can operate stably for a long time, and meet the needs of semiconductor manufacturing processes.

specification

Nitrogen production	1-5000Nm³/h
Nitrogen purity	95%-99.9999%
Nitrogen pressure	0.1-1.6MPa（Adjustable）
Nitrogen dew point	0~-60℃

Process flow

The air compressor compresses the raw air into high-pressure air, sends it to the air buffer tank to stabilize the pressure, and then further removes moisture, oil mist, etc. through the filter, and freezes and dehydrates through the refrigerated dryer to remove a large amount of moisture, and then enters the third stage. The filter further filters harmful substances, and then the clean compressed air enters from the bottom of the adsorption tower. After the air flow is diffused through the air diffusion device (universal spiral or porcelain ball), it evenly enters the adsorption tower for oxygen and nitrogen adsorption and separation, and then exits from the outlet end. The nitrogen flows out and enters the nitrogen storage tank. This nitrogen production process takes about 1 minute. Afterwards, through pressure equalization and pressure reduction (to normal pressure), the adsorbed impurity components (mainly oxygen) are removed, and the regeneration of the adsorbent is completed. The two adsorption towers operate in alternating cycles, continuously feeding raw air, and continuously producing qualified nitrogen.

Application

Nitrogen protection: In the semiconductor manufacturing process, many steps need to be performed in an oxygen-free or low-oxygen environment to prevent materials from being contaminated or oxidized by oxygen. Nitrogen generators can provide high-purity nitrogen to protect semiconductor materials and equipment and ensure purity and stability during the manufacturing process.

Vapor deposition: In semiconductor processes, vapor deposition is a common thin film deposition technology that requires the use of high-purity gases to provide deposition materials. The nitrogen generator can provide high-purity nitrogen for atmosphere control and protection during the vapor deposition process.

Cleaning and drying: Cleaning and drying are very important steps in semiconductor manufacturing, requiring the use of dry gas to remove moisture and impurities. Nitrogen generators can provide dry nitrogen for cleaning and drying semiconductor equipment and materials.

Gas Analysis: During the semiconductor manufacturing process, gases need to be analyzed and monitored to ensure the stability and consistency of process conditions. The nitrogen generator can provide high-purity nitrogen for calibration and gas supply of gas analysis instruments.

To sum up, nitrogen generators play an important role in the semiconductor industry and can provide high-purity, stable and reliable nitrogen to meet the strict requirements for gas quality and supply in the semiconductor manufacturing process.